TESTING METHOD FOR LEAKAGE

• Main Authors: OOTSUKA KANJI, USAMI TAMOTSU
• Format: Patent
• Language: English
• Published: 28.07.1982
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

PURPOSE:To perform accurate leakage tests with good efficiency by releasing a testing gas trapped in the test spacing of a sample with a gas trapping means in the stage of testing. CONSTITUTION:A testing gas absorbing material 8 consisting of a porous material is mounted to a cap 6 in a cavity 2 formed at the center of a base 1 of a package. In the case of performing a leakage test, the material 8 is beforehand mounted to the cap 6 prior to its sealing and therefore if a test gas is pressurized and forced into the cavity 2, the testing gas is trapped in the porous material of the material 8. A package 9 provided beforehand with such a gas trapping means is contained in a test vessel 10, and is hermetically sealed by means of a cover 11. The vessel 10 is connected to a mass spectrometer via a conduit 12. A heater 13 for heating the package is provided in the vessel 10, and when the package 9 is heated by this, the gas for testing having been trapped is released and if this released gas is detected with the mass spectrometer, the presence or absence of leakage is detected.