GAS SEAL STRUCTURE OF PROCESSING DEVICE

PROBLEM TO BE SOLVED: To restrain generation of wind hissing sound caused by exhaust of sealing gas while ensuring sufficient gas sealing function. SOLUTION: Sealing gas is passed forward through a clearance between the outer periphery of a main spindle 20 and the inner periphery of a front wall pla...

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Bibliographic Details
Main Authors TANAKA KOJI, KASAI SHOJI, TAKAMURA SEIZO
Format Patent
LanguageEnglish
Published 13.04.1999
Edition6
Subjects
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Summary:PROBLEM TO BE SOLVED: To restrain generation of wind hissing sound caused by exhaust of sealing gas while ensuring sufficient gas sealing function. SOLUTION: Sealing gas is passed forward through a clearance between the outer periphery of a main spindle 20 and the inner periphery of a front wall plate 30. By forming a recessed part 38 at the front wall plate 30, and a shielding plate 40 in front of it, a branched passage for branching from sealing gas passage to the diametrical outside is formed, so that a part of sealing gas is let to go off to another position through the branched passage.
Bibliography:Application Number: JP19970266736