ACTIVE MATRIX SUBSTRATE
PROBLEM TO BE SOLVED: To provide a low cost and high performance TFT(thin film transistor) by enabling elimination of a source wiring forming process. SOLUTION: A metallic film is formed and a gate wiring 7, source wiring 9, a gate electrode, a source electrode, and a drain electrode are formed of a...
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Main Author | |
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Format | Patent |
Language | English |
Published |
09.04.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a low cost and high performance TFT(thin film transistor) by enabling elimination of a source wiring forming process. SOLUTION: A metallic film is formed and a gate wiring 7, source wiring 9, a gate electrode, a source electrode, and a drain electrode are formed of a same material simultaneously. The gate wiring 7 is formed to be discontinuous with the source wiring 9 at their interconnecting part, but can be brought into a conductive state by being electrically connected with a bridge wiring via contact holes 8. Moreover, since a gate insulating film is formed between the gate wiring 7 and the source wiring 9, it is possible to keep an insulating state between them. |
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Bibliography: | Application Number: JP19970259719 |