ACTIVE MATRIX SUBSTRATE

PROBLEM TO BE SOLVED: To provide a low cost and high performance TFT(thin film transistor) by enabling elimination of a source wiring forming process. SOLUTION: A metallic film is formed and a gate wiring 7, source wiring 9, a gate electrode, a source electrode, and a drain electrode are formed of a...

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Bibliographic Details
Main Author SHIBUYA TSUKASA
Format Patent
LanguageEnglish
Published 09.04.1999
Edition6
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a low cost and high performance TFT(thin film transistor) by enabling elimination of a source wiring forming process. SOLUTION: A metallic film is formed and a gate wiring 7, source wiring 9, a gate electrode, a source electrode, and a drain electrode are formed of a same material simultaneously. The gate wiring 7 is formed to be discontinuous with the source wiring 9 at their interconnecting part, but can be brought into a conductive state by being electrically connected with a bridge wiring via contact holes 8. Moreover, since a gate insulating film is formed between the gate wiring 7 and the source wiring 9, it is possible to keep an insulating state between them.
Bibliography:Application Number: JP19970259719