PRODUCTION OF SEMICONDUCTOR AND ELECTRONIC CONTROL CARD THEREFOR, SEMICONDUCTOR PRODUCTION SYSTEM AND SEMICONDUCTOR INSPECTION SYSTEM

• Main Authors: TSUNODA SHIGERU, GO NAOKI, SASAKI SHINJI, ANAMI HIDETOSHI
• Format: Patent
• Language: English
• Published: 14.12.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To prevent a failed product from being taken in due to missing of process abnormality. SOLUTION: During wafer processing, a semiconductor production system 1 delivers system parameters concerning to the processing of a wafer to a data processor 2. The data processor 2 holds a p...