ILLUMINATOR, ALIGNER AND ILLUMINATING METHOD

PROBLEM TO BE SOLVED: To keep an illuminating light source in the optimum temperature state. SOLUTION: This illuminator including a light source 1 for emitting light with which photosensitive agent applied on an object is exposed and an air blowing means for blowing air to the light source 1 is prov...

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Bibliographic Details
Main Authors TSUJI TOSHIHIKO, SAKAMOTO TOSHIAKI
Format Patent
LanguageEnglish
Published 10.12.1999
Edition6
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To keep an illuminating light source in the optimum temperature state. SOLUTION: This illuminator including a light source 1 for emitting light with which photosensitive agent applied on an object is exposed and an air blowing means for blowing air to the light source 1 is provided with a detection means for detecting the temperature state of the light source 1 and a temperature control means for controlling the temperature state of the light source 1 based on the detected result by the detection means.
Bibliography:Application Number: JP19980139929