ORGANIC EL ELEMENT
PROBLEM TO BE SOLVED: To provide an Al-Li alloy element with high brightness, high efficiency, long life, and high display quality by providing a hole injection electrode, an electron injection electrode, at least one organic layer between these electrodes, forming the electron injection electrode b...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
30.11.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide an Al-Li alloy element with high brightness, high efficiency, long life, and high display quality by providing a hole injection electrode, an electron injection electrode, at least one organic layer between these electrodes, forming the electron injection electrode by sputtering process, and including the specified amount of Li to improve the film forming capability and adhesion on the interface between the electron injection electrode and the organic layer. SOLUTION: The content of Li is specified to 0.4-14 at.%. The pressure of sputtering gas in the sputtering process is limited to 0.1-5 Pa. By adjusting the pressure of the sputtering gas in this region, an AL-Li alloy having the Li content of the desirable range is easily obtained. By varying the pressure of the sputtering gas during formation of a film, an electron injection electrode having concentration gradient of Li is easily obtained. The sputtering is preferable to be a DC sputtering process. As magnetic field intensity, the magnetic flux density B on a target is preferable to be around 500-2,000 Gauss. |
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Bibliography: | Application Number: JP19980132771 |