APPARATUS FOR MEASURING LAYERED FINE STRUCTURE

PROBLEM TO BE SOLVED: To easily and correctly measure a sample such as nails, pulled teeth, etc., by an OCT. SOLUTION: A layered fine structure of a sample S is measured by an apparatus according to interferometric method using a low interference light, whereby a low coherent light is brought into t...

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Bibliographic Details
Main Authors KAWAAI MIZUE, TSUGITA TETSUYA
Format Patent
LanguageEnglish
Published 26.11.1999
Edition6
Subjects
DIAGNOSIS
HUMAN NECESSITIES
HYGIENE
IDENTIFICATION
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEDICAL OR VETERINARY SCIENCE
PHYSICS
SURGERY
TESTING
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Summary:PROBLEM TO BE SOLVED: To easily and correctly measure a sample such as nails, pulled teeth, etc., by an OCT. SOLUTION: A layered fine structure of a sample S is measured by an apparatus according to interferometric method using a low interference light, whereby a low coherent light is brought into the sample S and a reference mirror, and an interference signal between the light reflected or scattered from the sample S and the light reflected from the reference mirror is measured. The apparatus is provided with a sample stage 1 a set face of which for the sample S is rotatably arranged to a horizontal plane, a probe 1 for sending the low coherent light to the sample S, and a probe position adjustment means 20 for adjusting a position in an X axis, a Y axis or a Z axis direction of the probe 1.
Bibliography:Application Number: JP19980158528