METHOD AND APPARATUS FOR MEASURING SURFACE PROFILE OF PLANAR MIRROR SURFACE BODY

PROBLEM TO BE SOLVED: To achieve rapid measurement of a surface profile without any damage on the surface of a planar mirror surface body. SOLUTION: There are provided a laser oscillator 1, a galvano-mirror e3 for scanning the laser beam oscillated by the laser oscillator 1, a collimator lens system...

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Bibliographic Details
Main Author KATO MUNEHISA
Format Patent
LanguageEnglish
Published 16.11.1999
Edition6
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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