METHOD AND APPARATUS FOR MEASURING SURFACE PROFILE OF PLANAR MIRROR SURFACE BODY

PROBLEM TO BE SOLVED: To achieve rapid measurement of a surface profile without any damage on the surface of a planar mirror surface body. SOLUTION: There are provided a laser oscillator 1, a galvano-mirror e3 for scanning the laser beam oscillated by the laser oscillator 1, a collimator lens system...

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Bibliographic Details
Main Author KATO MUNEHISA
Format Patent
LanguageEnglish
Published 16.11.1999
Edition6
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To achieve rapid measurement of a surface profile without any damage on the surface of a planar mirror surface body. SOLUTION: There are provided a laser oscillator 1, a galvano-mirror e3 for scanning the laser beam oscillated by the laser oscillator 1, a collimator lens system 5 for converting the laser beam scanned by the galvano-mirror 3 into parallel beams to be illuminated obliquely to the surface of a planar mirror surface body 4, and a line sensor camera 7 for detecting the position of reflected light from the planar mirror surface body 4. In this apparatus, the use of laser beam reflection permits no damage on the surface of the planar mirror surface body 4 and rapid and high-precision measurement of the surface profile at a speed more than 10 times in the case of using a probe-typed roughness measuring device. This thus permits the total inspection of the planar mirror surface body 4 so as to improve the product quality. The planar mirror surface body 4 used in the inspection can be also used as a product, since the body has no damage.
Bibliography:Application Number: JP19980120963