SCANNING ELECTRON MICROSCOPE

• Main Authors: YOSHIIE MITSUYOSHI, MINAMIDE YOSHINORI
• Format: Patent
• Language: English
• Published: 08.10.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To reduce the picture element number per a single frame, and improve SIN of a display image by performing simultaneous processing of a spatial filter by a means for performing arithmetic processing by reading out image data by performing A/D conversion on an image signal obtained by irradiating an electron beam to a sample by a raster scanning method, from a written-in first memory. SOLUTION: Image data of a sample 12 by an electron beam 11 is read out of an image memory 14 written in through an A/D converter 13 to be displayed by a display device 17 through a display memory 16 after being processed by a computing element 15. Image and display memories 14, 16 have a write-in port and a readout port mutually independent in the write-in and readout timing and an access address. The computing element 15 reduces an image on which for example, image data is taken in the image memory 14 in 2560×1920 picture elements per a single frame to 1/4 in both longitudinal and lateral directions while performing spatial filter processing being additively averaging processing of 4×4 picture element values. S/N of a display image quality is improved by a method of thinning out a single picture element with every 4 picture elements.