ELECTRODEPOSITON DEVICE OF LONG-SIZED SUBSTRATE

PROBLEM TO BE SOLVED: To provide an electrodeposition device of a long-sized substrate by which a uniform oxide film without generating irregularity of wave-shaped and striped patterns is electrodeposited uniformly on the long-sized substrate. SOLUTION: This electrodeposition device of a long-sized...

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Bibliographic Details
Main Authors ARAO KOZO, TOYAMA JO, SONODA YUICHI, MIYAMOTO YUSUKE
Format Patent
LanguageEnglish
Published 24.08.1999
Edition6
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide an electrodeposition device of a long-sized substrate by which a uniform oxide film without generating irregularity of wave-shaped and striped patterns is electrodeposited uniformly on the long-sized substrate. SOLUTION: This electrodeposition device of a long-sized substrate is provided with an electrodeposition tank for applying a current between a long-sized substrate 1001 and an electrode in an electrodeposition bath 1016 to form an oxide film on the substrate 1001, a washing means for washing the substrate 1001 passed through the tank with water and a drying means for forcedly drying the passed substrate 1001. Then, the device has a conveying speed in which a time required for a bath soln. brought out on the substrate surface from the bath 1016 to be naturally dried and to deposit the solute in a conveyor line between the tanks is shorter than a time required for the substrate to pass between the tanks by a substrate conveying means.
Bibliography:Application Number: JP19980034446