ELECTRODEPOSITION TANK AND ELECTRODEPOSITION DEVICE

PROBLEM TO BE SOLVED: To provide an electrodepsition tank by which a uniform oxide film without generating irregularity is electrodeposited uniformly on a substrate and the oxide film appropriate to the reflecting layer of a solar cell, etc., can be prepared. SOLUTION: A current is applied between a...

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Bibliographic Details
Main Authors ARAO KOZO, TOYAMA JO, SONODA YUICHI, MIYAMOTO YUSUKE
Format Patent
LanguageEnglish
Published 24.08.1999
Edition6
Subjects
APPARATUS THEREFOR
CHEMISTRY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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Summary:PROBLEM TO BE SOLVED: To provide an electrodepsition tank by which a uniform oxide film without generating irregularity is electrodeposited uniformly on a substrate and the oxide film appropriate to the reflecting layer of a solar cell, etc., can be prepared. SOLUTION: A current is applied between a substrate and an electrode in an electrodeposition bath 1001 to form an oxide film on the substrate in this electrodeposition tank. The tank is provided with an outer vessel 100 formed by a metallic material and inner vessels 1011 to 1014 formed by a dielectric material and contg. anodes 1003 to 1006.
Bibliography:Application Number: JP19980034444