SUBSTRATE PROCESSING EQUIPMENT

PROBLEM TO BE SOLVED: To readily set processing and recognize the state of execution in each stage, by providing each input panel with a letter string display part which can display information regarding setting of processing recipe as a letter string. SOLUTION: In lot processing, a letter string di...

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Bibliographic Details
Main Authors HAMADA TETSUYA, ONO MOTOAKI
Format Patent
LanguageEnglish
Published 30.07.1999
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To readily set processing and recognize the state of execution in each stage, by providing each input panel with a letter string display part which can display information regarding setting of processing recipe as a letter string. SOLUTION: In lot processing, a letter string display part 452 displays a letter string which accelerates selection of flow processing conditions. In processing on a single-wafer basis, when a processing condition selection button 460 is operated to make a processing condition display part 450 display a single- wafer basis processing mode, a letter display part 452 also displays that a single-wafer basis processing mode is selected. Here, a decision button 468 is selected and set. Then, each flow processing condition is set by operating the processing condition selection button 460. The process is executed recognizing each processing condition by the letter string display part 452. Furthermore, change of setting of flow condition is also made possible while or after a processing recipe is set by selecting a cancellation button 470. In the process, a letter string display part 452 also displays contents, etc., of change.
Bibliography:Application Number: JP19980013247