PRODUCTION OF MAGNETIC RECORD MEDIUM

• Main Authors: MURAYAMA HIDEKI, SASAOKA YASUSHI, KOZU JUNICHI
• Format: Patent
• Language: English
• Published: 09.07.1999
• Edition: 6
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To prevent the sticking of particles generated in forming a protective layer comprising a carbon film to the surface of a magnetic record medium by regulating the pressure of a monomer in a film forming process to a specified value or below. SOLUTION: When a magnetic layer is formed on a nonmagnetic substrate and a protective layer comprising a carbon film is formed, the carbon film is formed by a film forming process including the decomposition of a stock monomer. The stock monomer is introduced into a device and decomposed with electrical energy, energy by thermoelectrons emitted from a heated filament, energy by accelerated electrons or the like to generate film forming species and the protective film is formed by leading the species onto the substrate. The pressure of the monomer in the film forming process is regulated to <=10 Pa and the objective magnetic record medium almost free from a contaminant and excellent in griding property is obtd.