PASSAGE CROSS-SECTIONAL AREA ADJUSTING DEVICE

PROBLEM TO BE SOLVED: To smoothly change the opening cross-sectional area and to realize rapid feedback control by expanding/contracting an elastic tube member arranged in the piping between a fluid driving source and a chamber while almost maintaining a circular cross section. SOLUTION: This passag...

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Bibliographic Details
Main Authors NODA KATSUHIRO, SAKAMOTO HIRONORI
Format Patent
LanguageEnglish
Published 22.06.1999
Edition6
Subjects
ACTUATING-FLOATS
BLASTING
COCKS
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
JOINTS OR FITTINGS FOR PIPES
LIGHTING
MEANS FOR THERMAL INSULATION IN GENERAL
MECHANICAL ENGINEERING
PIPES
SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING
TAPS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To smoothly change the opening cross-sectional area and to realize rapid feedback control by expanding/contracting an elastic tube member arranged in the piping between a fluid driving source and a chamber while almost maintaining a circular cross section. SOLUTION: This passage cross-sectional area adjusting device 10 is arranged between vacuum pump (fluid driving source) side piping 12 and chamber side piping 14, and has an elastic tube 26 (an elastic tube member) to connect the piping 12 to the piping 14. The elastic tube 26 has a circular cross-sectional passage 26a fitted to the outside of the piping 12 and 14, and the cross-sectional area of the passage 26a can be elastically expanded/contracted. A passage expanding/contracting driving mechanism 28 is driven by a pulse motor 24, and is driven so as to expand/contract the passage 26a of the elastic tube 26 while almost maintaining a circular cross section. The opening cross-sectional area is smoothly changed without being influenced by gas required for prescribed work and a solid material caused by the gas, and rapid feedback control can be realized.
Bibliography:Application Number: JP19970337121