HEIGHT MEASURING APPARATUS OF SPHERICAL OBJECT AND ITS MEASURING METHOD

PROBLEM TO BE SOLVED: To precisely measure in a short time the height of a spherical object such as a solder ball formed in the bottom part of a package of BGA(ball grid array)/CSP(chip size package). SOLUTION: This apparatus is equipped with a first light source 5 casting a light on a spherical obj...

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Bibliographic Details
Main Authors KANDA DAIZO, MORITA KAZUMI
Format Patent
LanguageEnglish
Published 18.06.1999
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PROBLEM TO BE SOLVED: To precisely measure in a short time the height of a spherical object such as a solder ball formed in the bottom part of a package of BGA(ball grid array)/CSP(chip size package). SOLUTION: This apparatus is equipped with a first light source 5 casting a light on a spherical object 2 from the vertical direction, a plurality of second light sources 10a, 10b casting lights on the object 2 from the directions inclined at specified angles to the optical axis of the first light source 5, a slit 6 passing the lights which are cast from the first and the second light sources 5, 10a, 10b and reflected from the spherical object 2, a position detector 7 for detecting the positions of the lights which have passed the slit 6, and a height correction means for correcting the height of the spherical object 2 which is obtained on the basis of the detection output of the position detector 7 by the first light source 5, on the basis of the detection outputs of the position detector 7 by the second light sources 10a, 10b.
Bibliography:Application Number: JP19970322917