CARRIER ROBOT OF THIN TYPE SUBSTRATE

• Main Authors: KIRIHATA TADASHI, NAKAMORI TAKAO
• Format: Patent
• Language: English
• Published: 15.06.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; HANDLING THIN OR FILAMENTARY MATERIAL; MANIPULATORS; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a robot which can improve the accuracy of the horizontal surface of the substrate installing surface of a hand, as well as to increase the elevating stroke amount of the hand. SOLUTION: A robot 1 has a fixing part 10; a lower step movable part 20 and an upper step mo...