CARRIER ROBOT OF THIN TYPE SUBSTRATE

• Main Authors: KIRIHATA TADASHI, NAKAMORI TAKAO
• Format: Patent
• Language: English
• Published: 15.06.1999
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; HANDLING THIN OR FILAMENTARY MATERIAL; MANIPULATORS; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a robot which can improve the accuracy of the horizontal surface of the substrate installing surface of a hand, as well as to increase the elevating stroke amount of the hand. SOLUTION: A robot 1 has a fixing part 10; a lower step movable part 20 and an upper step movable part 30 movable up and down to the fixing part 10; and a hand part 40 provided at the upper side of the upper step movable part 30. A flange part 12 is provided to the upper part of the fixing part 10, and the robot 1 is supported by fixing the flange part 12 to a frame 3. And a regulation screw to regulate the horizontal condition of the substrate installing surface of the hand 43 of a hand part 40 is provided to the flange part 12, and the centering of the hand 43 is carried out by regulating the regulation screw in the robot setting time. In the lower step movable part 20 and the upper step movable part 30, a rack and a pinion are operated by a motor fixed to the fixing part 10, and the upper step movable part 30 is moved up and down at the stroke larger than the lower step movable part 20.