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Summary:PROBLEM TO BE SOLVED: To improve the condensing efficiency of a microlens while enhancing the transmissivity thereof by forming the cross-sectional shape of the surface of the microlens into a more circular arc shape. SOLUTION: After the pattern 4 of a photosensitive resin is irradiated with UV rays, the pattern is heated to form a microlens 5. Further, a positive type photosensitive resin using a novolac resin is used. The irradiation quantity of UV rays is 14-20 mg/cm per 1 μm of the film thickness of the photosensitive resin and the heating temp. of the pattern is made higher than the m.p. of the photosensitive resin by 10-20 deg.C.
Bibliography:Application Number: JP19970320163