ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide a transmission microscope capable of performing an electron beam irradiation at a beam electric current necessary only for a sample area necessary for image observation or exposure, and reducing a damage of the sample caused by an excess electron beam irradiation. SO...

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Bibliographic Details
Main Authors NAGAOKI ISAO, KOBAYASHI HIROYUKI, YOTSUTSUJI TAKAFUMI
Format Patent
LanguageEnglish
Published 21.05.1999
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GAMMA RAY OR X-RAY MICROSCOPES
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
IRRADIATION DEVICES
MEASURING
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a transmission microscope capable of performing an electron beam irradiation at a beam electric current necessary only for a sample area necessary for image observation or exposure, and reducing a damage of the sample caused by an excess electron beam irradiation. SOLUTION: A relationship within at least two staged lenses and an exciting electric current of each lens of an irradiation lens system containing an electron iris and an electron beam density per a sample, and a size of an electron beam irradiation area on the sample surface is memorized by means of tables and mathematics, for example when an enlarged magnification is intended to be changed in such a condition that the irradiation electron beam density is made constant, according to the relationship an exciting condition of each lens of irradiation lens system is searched and fixed. A locus 65 of the area irradiated with the electron beam on the sample surface 64 is displayed to a display device.
Bibliography:Application Number: JP19970298410