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Summary:PROBLEM TO BE SOLVED: To precisely drill at a specified position against a standard mark even when it is a sheet type substrate. SOLUTION: This device has driving means 8, 9 to move a positioning table 6 fixed by protruding a part of a substrate 4 having a standard mark, a radiation detector 5 to detect a picture image of the standard mark by radiation, a computing means to compute positional slipping quantity of the substrate 4 by slipping quantity of a picture image signal of the standard mark by receiving it, a control means to correct positional slipping quantity of the substrate 4 by controlling the driving means 8, 9 in accordance with the computed positional slipping quantity and a drilling means 10 to drill at a specified position against the standard mark on an protruding part.
Bibliography:Application Number: JP19970164524