RESONANCE STRUCTURE AND FORMATION OF RESONANCE STRUCTURE

• Main Authors: MATTES MICHAEL F, SEEFELDT JAMES D
• Format: Patent
• Language: English
• Published: 10.04.1998
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To electronically detect stresses and strains by changing resonance frequency of a resonating beam by movement of a diaphragm with a flexibility, moving in responce to a change in the impressed force. SOLUTION: Diaphragm parts 86, 90 are deflectable in the upward or downward directions in responce to the impressed force, and its movement changes the stress of a beam 62 and the beam 62 resonates by the movement of a capacitive drive. A resistance value of a piezoelectric resistance 122 changes together with respective movements of the beam 62, so that the oscillation of the beam 62 caused oscillation of the resistance in the resistance value of the piezoelectric resistance 122. The force applied to the diaphragm generates stresses or strains in the direction of its longitudinal direction in the beam 62. The stress/strain changes the frequency at which the beam 62 resonates. A change in the frequency can be electronically detected by using a signal conditioning circuit, for detecting a change of a resistance value of the piezoelectric resistance.