SEMICONDUCTOR MULTILAYERED FILM REFLECTION MIRROR AND ITS PRODUCTION
PROBLEM TO BE SOLVED: To obtain a semiconductor multilayered film reflection mirror having excellent characteristics by doping the semiconductor with a p-type carrier to high density while strictly controlling the film thickness. SOLUTION: A semiconductor multilayered film reflection mirror is produ...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
18.12.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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