PRESSURE GRADIENT TYPE ELECTRON BEAM EXCITING PLASMA GENERATION DEVICE

• Main Authors: BAN MASAHITO, HASEGAWA TAKESHI, MORI YUKITAKA, RIYUUJI MAKOTO
• Format: Patent
• Language: English
• Published: 08.12.1998
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a pressure gradient type electron beam exciting plasma generation device which assures good economy, can make independent control of the current and energy of an electron beam, and is adaptable to diversified specifications. SOLUTION: A cathode chamber, a discharge chamber, and a process chamber 2 equipped with accelerating electrode 20 are installed in the sequence as named, and a discharging gas is allowed to flow into the cathode chamber, and current is carried to between a cathode and a discharging anode 6 so that a discharge plasma is produced, and electrons are drawn out by carrying a current to between the anode 6 and electrode 20, and upon acceleration, are introduced into the process chamber 2 so that a crude material gas in the chamber is electrolytically dissociated. From the cathode chamber to the process chamber 2, a pressure gradient is generated by thin hole provided in an intermediate electrode, and thereby the discharging gas is exhausted from the process chamber. It is preferred that the accelerating electrode 20 is positioned opposingly to the anode 6.