BEAM POSITION CORRECTION DEVICE

PROBLEM TO BE SOLVED: To correct a beam position resulting from the change of beam conditions in a beam position correction device. SOLUTION: A beam position correction device 1 is provided with a beam deflection means 23 deflecting a beam position for the correction of a beam, and a correction mean...

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Bibliographic Details
Main Authors MITAMURA SHIGEHIRO, OTANI MASAHIRO
Format Patent
LanguageEnglish
Published 04.12.1998
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To correct a beam position resulting from the change of beam conditions in a beam position correction device. SOLUTION: A beam position correction device 1 is provided with a beam deflection means 23 deflecting a beam position for the correction of a beam, and a correction means 10 adjusting the beam deflection amount of the beam deflection means 23 and correcting the beam position. Based on relationship between beam conditions and a beam position correction amount, the correction means 10 determines the beam deflection amount corresponding to the beam conditions so that the beam is deflected based on the previously obtained relationship between the beam conditions and the beam position correction amount so as to correct the beam position resulting from the change of the beam conditions.
Bibliography:Application Number: JP19970125718