VACUUM PROCESSING UNIT

• Main Authors: MATOBA KOJI, YAMAMOTO TATSUSHI
• Format: Patent
• Language: English
• Published: 02.12.1998
• Edition: 6
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVEYING; DIFFUSION TREATMENT OF METALLIC MATERIAL; HANDLING THIN OR FILAMENTARY MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To increase vacuum processing speed, and to improve a ratio of articles of good quality, by comprising a vacuum conveying chamber, a vacuum processing chamber facing to the vacuum conveying chamber, and an installation port in which a matter to be treated is to be installed, and conveying the matter to be treated, while holding the same by a specific number of sheets of frames. SOLUTION: When a matter to be treated 1 is conveyed, it is held by at least two sheets of frames to be conveyed. That is, the matter to be treated 1 is inserted and held between a frame 2 which comprises plural hole parts 22 and the projecting parts 21 mounted on a periphery thereof, and a frame 3 which comprises an opening part 33 where a specific vacuum processing is to be performed, and the hole parts 31 mounted on the periphery thereof, to be engaged with the projecting parts of the frame 2, and of which a board holding part 32 is recessed. Whereby the application of the excessive force to the matter to be treated 1, and the cracking and broken can be prevented, and the ratio of articles of good quality can be improved. Further the matter to be treated 1 is conveyed while protected by the frames, so that it can be conveyed at a high speed.