PROCESS GAS TRANSFER UNIT

PROBLEM TO BE SOLVED: To provide a small size and laminated process gas transfer unit in which a system communicating a purge valve and a check valve in series is connected to the process gas flow. SOLUTION: A process gas input passage 20 to communicate the input port of a feeding valve 13 and a pre...

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Bibliographic Details
Main Authors INAGAKI TOSHIYASU, ITO MASATO
Format Patent
LanguageEnglish
Published 24.11.1998
Edition6
Subjects
ACTUATING-FLOATS
BLASTING
COCKS
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HEATING
LIGHTING
MECHANICAL ENGINEERING
PIPE-LINE SYSTEMS
PIPE-LINES
STORING OF DISTRIBUTING GASES OR LIQUIDS
TAPS
TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a small size and laminated process gas transfer unit in which a system communicating a purge valve and a check valve in series is connected to the process gas flow. SOLUTION: A process gas input passage 20 to communicate the input port of a feeding valve 13 and a precess gas outer inlet 18; a process gas output passage to communicate the output port 27 of the feeding valve 13 and a process gas outer outlet 19; a purge output passage 22 to communicate the output port 29 of a purge valve 12 and the process gas output passage; a check valve output passage 23 to communicate the input port 30 of the purge valve 12 and the output port 31 of the check valve 14; an oblique passage to communicate the input port 32 of the check valve 14 and a purge gas outer inlet; a manifold forming a crossing passage; and a lower side passage block; are provided.
Bibliography:Application Number: JP19970122525