SUBSTRATE CARRYING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate carrying device in which the space of a whole device can be saved, and the presence or absence of a substrate in a cassette can be detected without increasing initial costs even when the number of cassettes for housing the substrate or the number of subst...

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Bibliographic Details
Main Authors SHIMURA KAZUHIKO, OZAWA TSUTOMU
Format Patent
LanguageEnglish
Published 17.11.1998
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a substrate carrying device in which the space of a whole device can be saved, and the presence or absence of a substrate in a cassette can be detected without increasing initial costs even when the number of cassettes for housing the substrate or the number of substrates to be housed in one cassette is increased. SOLUTION: This device is provided with a movable hand 8 for carrying an LCD substrate 1 out of a cassette 2 in which at least one LCD substrate 1 is housed or carrying the substrate 1 in the cassette 2. A pair of mutually facing transmission sensors 9 are provided at the handler 8 for detecting a corner part 1a of the LCD substrate 1 in the cassette 2 with non-contact.
Bibliography:Application Number: JP19970117336