METHOD FOR OBSERVING SURFACE FORM

• Main Author: TAKASU MASAO
• Format: Patent
• Language: English
• Published: 27.10.1998
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To observe a surface form without distortion by correcting the signal quantity of reflected electron or secondary electron on the basis of a calculated angle slippage. SOLUTION: An error angle can be determined when two conditions of measurement magnification [values of (x), (y)] and the distance [value (z)] from a scanning coil to a sample surface are set. Thus, the error angle portion obtained by calculation is corrected with respect to the information (angle including error) of form obtained by two-dimensional scanning, whereby a precise form can be provided in all positions within the scanning area. The inclining direction of the angle error in all positions except the center of the scanning area is the direction directing from the center to the measuring point. Thus, the true inclination is obtained by the measured inclination + the calculated error angle. This correction can be performed by either one method of correcting the irregularity information calculated as the three-dimensional form directly as an angle value, and correcting the electron signal intensity before it is made into the irregularity information.