FERROELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To obtain a PZT film which is thick and good in piezoelectric characteristics by using a two-layered structure composed of a first layer film formed without mixing binder in material, and a second layer film formed on the first layer film by mixing binder in the material. SOLUT...
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Main Author | |
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Format | Patent |
Language | English |
Published |
23.10.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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