TREATMENT DEVICE PROVIDED WITH TREATMENT CONTAINER HAVING DIRECT ACTING MECHANISM

• Main Authors: HAMADA SHIRO, TOMITA YOSHIYUKI
• Format: Patent
• Language: English
• Published: 20.10.1998
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a treatment device with a treatment container hard to affect by the thermal strain generated by heating a material to be treated which can control the generation of very small refuses in the treatment container. SOLUTION: A treatment device is provided with two driving supporting shaft 2a and 2b with one ends running through walls of a treatment container 1 and protruded to the outside, and linear motors 4a and 4b for translation of the supporting shafts in the axial direction to the treatment container are provided on the one end sides of the driving supporting shafts. A retaining stand 6 for retaining a base 8 is cantilever supported on the other sides of the driving supporting shafts in the treatment container. Vacuum bellows 5a and 5b are so provided as to keep the airtightness in the treatment container on the sites on which the driving supporting shafts run through the walls of the container.