ALIGNER

PROBLEM TO BE SOLVED: To prevent erroneous measurement in a laser interference device without using a low rigid material and to prevent adverse influences by heat, by providing a vacuum heat insulating member constituted of a non-permeable bag surrounding a core material having heat insulating prope...

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Bibliographic Details
Main Author KAMIYA SABURO
Format Patent
LanguageEnglish
Published 07.08.1998
Edition6
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To prevent erroneous measurement in a laser interference device without using a low rigid material and to prevent adverse influences by heat, by providing a vacuum heat insulating member constituted of a non-permeable bag surrounding a core material having heat insulating property in the vacuum state for at least a part of an aligner. SOLUTION: A vacuum heat insulating member 100 is provided in the wall of a chamber. The vacuum heat insulating member 100 is constituted of a core material 102, a container 101 filling the material in the vacuum state and a heat sealing layer 103 laminating them. A plastic metal, aerogel and the powders of silica and pearlite are considered for the core material 102. It is desirable to use the material where foams are prevented from being confined in the metal when pressure is reduced to the vacuum state, in the case when the plastic plate is used as the core material. The container 101 is the (gas barrier property) bag which does not have permeability, and it is constituted of metal foil (aluminum, for example).
Bibliography:Application Number: JP19970280574