ALIGNER
PROBLEM TO BE SOLVED: To prevent erroneous measurement in a laser interference device without using a low rigid material and to prevent adverse influences by heat, by providing a vacuum heat insulating member constituted of a non-permeable bag surrounding a core material having heat insulating prope...
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Main Author | |
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Format | Patent |
Language | English |
Published |
07.08.1998
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To prevent erroneous measurement in a laser interference device without using a low rigid material and to prevent adverse influences by heat, by providing a vacuum heat insulating member constituted of a non-permeable bag surrounding a core material having heat insulating property in the vacuum state for at least a part of an aligner. SOLUTION: A vacuum heat insulating member 100 is provided in the wall of a chamber. The vacuum heat insulating member 100 is constituted of a core material 102, a container 101 filling the material in the vacuum state and a heat sealing layer 103 laminating them. A plastic metal, aerogel and the powders of silica and pearlite are considered for the core material 102. It is desirable to use the material where foams are prevented from being confined in the metal when pressure is reduced to the vacuum state, in the case when the plastic plate is used as the core material. The container 101 is the (gas barrier property) bag which does not have permeability, and it is constituted of metal foil (aluminum, for example). |
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Bibliography: | Application Number: JP19970280574 |