STEERING COIL POSTURE ADJUSTING DEVICE FOR VACUUM FILM FORMING APPARATUS

• Main Authors: SAKAMI TOSHIYUKI, TANAKA MASARU
• Format: Patent
• Language: English
• Published: 04.08.1998
• Edition: 6
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To make it possible to adjust the posture of a steering coil even if a plasma beam has torsion and to improve film quality by making it possible to fix the steering coil by positioning the horizontal shaft and perpendicular shaft of a biaxial adjusting mechanism to and with a very small angle and high accuracy. SOLUTION: The steering coil 3 is supported by the biaxial adjusting mechanism 10 controllably in its posture by the horizontal shaft H1 and the perpendicular shaft orthogonal therewith. The biaxial adjusting mechanism 10 comprises a base frame 11, a perpendicular shaft adjusting mechanism which is supported at this base frame 11 and has a rotary frame of a U-shaped planar material rotatable around the perpendicular shaft V1 and a horizontal shaft adjusting mechanism which is supported at this rotary frame 12 oscillatably around the horizontal shaft H1 and has an oscillation frame 14 for housing and holding the lower part of the steering coil 3. This oscillation frame 14 is formed of a U-shaped planar material of the size slightly smaller than the rotary frame 12. The base frame 11 is supported at a stand 13.