METHOD FOR ADJUSTING OUTPUT CHARACTERISTIC OF SEMICONDUCFOR PRESSURE SENSOR

• Main Authors: NIDAN AKIRA, KAMIYA TETSUAKI
• Format: Patent
• Language: English
• Published: 29.05.1998
• Edition: 6
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To obtain an output characteristic adjustment method that is capable of effecting laser trimming easily. SOLUTION: A sensor chip 6 has a diaphragm 9 and a resistor 11 for adjusting output characteristics and is joined onto a glass pedestal 7, and an external application pressur...