METHOD FOR ADJUSTING OUTPUT CHARACTERISTIC OF SEMICONDUCFOR PRESSURE SENSOR

PROBLEM TO BE SOLVED: To obtain an output characteristic adjustment method that is capable of effecting laser trimming easily. SOLUTION: A sensor chip 6 has a diaphragm 9 and a resistor 11 for adjusting output characteristics and is joined onto a glass pedestal 7, and an external application pressur...

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Bibliographic Details
Main Authors NIDAN AKIRA, KAMIYA TETSUAKI
Format Patent
LanguageEnglish
Published 29.05.1998
Edition6
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To obtain an output characteristic adjustment method that is capable of effecting laser trimming easily. SOLUTION: A sensor chip 6 has a diaphragm 9 and a resistor 11 for adjusting output characteristics and is joined onto a glass pedestal 7, and an external application pressure for a reference pressure room 13 that is formed between the sensor chip 6 and the glass pedestal 7 is detected by a piezo resistance layer 10 that is provided at the diaphragm 9. In a chamber where an internal pressure can be adjusted, a characteristic value is measured under two types of pressures that differ from atmospheric pressure and a resistor for adjusting output characteristics is trimmed while a characteristic value is measured based on the characteristic value under atmospheric pressure.
Bibliography:Application Number: JP19960300643