TRANSDUCER SUPPORTING MECHANISM
PROBLEM TO BE SOLVED: To make the mass production of head supporting mechanisms possible and to improve the cost by etching an Si substrate by crystal anisotropy, thereby forming a slope. SOLUTION: This transducer supporting mechanism consists of the head of a magnetic disk device and a suspension 1...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
07.02.1997
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To make the mass production of head supporting mechanisms possible and to improve the cost by etching an Si substrate by crystal anisotropy, thereby forming a slope. SOLUTION: This transducer supporting mechanism consists of the head of a magnetic disk device and a suspension 1 consisting of Si. The slope 7 is formed on the Si suspension 1 by wet etching utilizing the crystal anisotropy and signal lines 6 are formed by sputtering or vapor deposition, etc., using a shadow mask on the slope 7. As a result, the execution of the electrical connection of the Si suspension 1 and the transducer 3 by batch working is made possible. The mass production of the transducer supporting mechanisms of heads, sensors, etc., and the cost reduction are made possible. |
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Bibliography: | Application Number: JP19950175844 |