CLEAN ROOM AND RUNNING METHOD THEREOF

• Main Authors: KAWABATA SUSUMU, HAMA NOBORU, AOKI TERUAKI, OZAKI HIDETO, IWAMA SENJI, UEDA SEIJI
• Format: Patent
• Language: English
• Published: 30.09.1997
• Edition: 6
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; RANGES; VENTILATING; WEAPONS

PROBLEM TO BE SOLVED: To enable a coexistence of spaces which differ in a cleanliness without using hanging walls or back panels. SOLUTION: Spaces 104H, 104L in a clean room 104 is divided by a buffer space 104B. With the use of a fan coil unit 200, a mean air speed per a unit area in the buffer spa...