CLEAN ROOM AND RUNNING METHOD THEREOF

PROBLEM TO BE SOLVED: To enable a coexistence of spaces which differ in a cleanliness without using hanging walls or back panels. SOLUTION: Spaces 104H, 104L in a clean room 104 is divided by a buffer space 104B. With the use of a fan coil unit 200, a mean air speed per a unit area in the buffer spa...

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Bibliographic Details
Main Authors KAWABATA SUSUMU, HAMA NOBORU, AOKI TERUAKI, OZAKI HIDETO, IWAMA SENJI, UEDA SEIJI
Format Patent
LanguageEnglish
Published 30.09.1997
Edition6
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To enable a coexistence of spaces which differ in a cleanliness without using hanging walls or back panels. SOLUTION: Spaces 104H, 104L in a clean room 104 is divided by a buffer space 104B. With the use of a fan coil unit 200, a mean air speed per a unit area in the buffer space 104B is set to be lower than a mean air speed per a unit area in a high cleanliness area and higher than a mean air speed per a unit area in a low cleanliness area. Due to such a construction, without using a hanging wall or a back panel. The flow of air is restricted exclusively to a flow of clean air from the high cleanliness area to the low cleanliness area, while a cross contamination due to a turbulent flow in the low cleanliness area can be effectively prevented. In case that the fan coil units 200 which are disposed in the low cleanliness areas and the buffer spaces are controlled such that they can be operated and stopped independently from each other, a contamination at the time of maintenance can be prevented and the running cost can be reduced.
Bibliography:Application Number: JP19960092962