OPTICAL PERFORMANCE EVALUATING DEVICE AND OPTICAL PERFORMANCE EVALUATING METHOD

PROBLEM TO BE SOLVED: To obtain a modulation transmitting function by which a generating error is minimized. SOLUTION: An image of a slit pattern projected by a projecting means is formed on a light receiving surface of a CCD by using a measuring optical system, and a modulation transmitting functio...

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Bibliographic Details
Main Author SHIBAZAKI TAKAMI
Format Patent
LanguageEnglish
Published 20.06.1997
Edition6
Subjects
MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Summary:PROBLEM TO BE SOLVED: To obtain a modulation transmitting function by which a generating error is minimized. SOLUTION: An image of a slit pattern projected by a projecting means is formed on a light receiving surface of a CCD by using a measuring optical system, and a modulation transmitting function of the measuring optical system is found on the basis of data obtained by the CCD. In this case, a Fourier transform part 12 performs Fourier transform on data obtained by the CCD with every spatial frequency. An operation part 13 integrates modulation transmitting functions with every spatial frequency being a processing result by the Fourier transform part 12 with every spatial frequency. A leveling processing part 14 finds a modulation transmitting function of the measuring optical system by leveling the modulation transmitting functions obtained with every spatial frequency. A modulation transmitting function by which a measuring error of the measuring optical system is reduced can be obtained by such operation.
Bibliography:Application Number: JP19950315324