MANUFACTURE OF THIN FILM MAGNETIC HEAD

PROBLEM TO BE SOLVED: To reduce variances in breadth of a core of an upper magnetic pole layer thereby to obtain the stable upper magnetic pole layer when a thin film magnetic head is manufactured, by applying resists of optimum thicknesses separately to a pole part and a yoke part of different heig...

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Bibliographic Details
Main Authors UCHIUMI KENJI, KAKITA MANABU
Format Patent
LanguageEnglish
Published 20.05.1997
Edition6
Subjects
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Summary:PROBLEM TO BE SOLVED: To reduce variances in breadth of a core of an upper magnetic pole layer thereby to obtain the stable upper magnetic pole layer when a thin film magnetic head is manufactured, by applying resists of optimum thicknesses separately to a pole part and a yoke part of different heights of the upper magnetic pole layer of the thin film magnetic head. SOLUTION: According to the method, a lower magnetic pole layer 2 is formed on a substrate 1, onto which a gap layer 3 is formed. An insulating layer is coated over the gap layer 3. A coil layer and a necessary count of insulating layers covering the coil layer are further formed thereon. While an upper magnetic pole layer is formed after the necessary count of layers are formed, a pole part 7 and a yoke part 8 of different heights of the upper magnetic pole layer are formed by applying resists of optimum thickness separately.
Bibliography:Application Number: JP19950287724