PRODUCTION OF OPTICAL DISK AND APPARATUS FOR PRODUCTION OF OPTICAL DISK

• Main Author: SUWABE MASAJI
• Format: Patent
• Language: English
• Published: 03.12.1996
• Edition: 6
• Subjects: INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PHYSICS

PURPOSE: To produce optical disks having good characteristics, such as error rates, at a good production yield by preventing the adherence of dust on the optical disks at the time of producing these disks. CONSTITUTION: The temp. Tw of the inside walls of a vacuum chamber 3 where dielectric films are formed is maintained at a range of (Tr+ Tmax)/2<=Tw<=Tmax at the time of stopping production when the temp. of the inside walls of this vacuum chamber is defined as Tw, the max. temp. of the inside walls at the time of forming the dielectric films in the vacuum chamber as Tmax and the ordinary temp. of the inside walls at the time of forming the dielectric films in the vacuum chamber as Tr. Metallic plates 12a, 12b, 12c, 12d, 12e having thermocouples 15 which are temp. measuring instruments and heater wires 13 which are heating means are disposed on the inside wall side of, for example, the first vacuum chamber 3 where the dielectric films are formed. The temp. Tw of the inside walls of the first vacuum chamber 3 is preferably maintained within the range described above by using these.