BONDING DEVICE

PURPOSE: To provide a bonding device, which can effectively prevent the oscillation of a driving system even in the case where the oscillation frequency of this driving system is shifted. CONSTITUTION: The oscillation frequency of a driving motor 15, which drive a bonding tool, is always monitored b...

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Bibliographic Details
Main Authors SUEMATSU MUTSUMI, SATO TSUYOSHI, OTANI KAZUMI
Format Patent
LanguageEnglish
Published 22.10.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: To provide a bonding device, which can effectively prevent the oscillation of a driving system even in the case where the oscillation frequency of this driving system is shifted. CONSTITUTION: The oscillation frequency of a driving motor 15, which drive a bonding tool, is always monitored by using an FET 25 and in the case where this oscillation frequency is shifted, the setting of a programmable filter 24 incorporated in a speed feedback loop for feedback control is changed by the command of a filter control part 26 and the component of the oscilation frequency is made to attenuate from the detection signal of a speed detecting sensor 21.
Bibliography:Application Number: JP19950082801