OPTICAL MODULATOR AND ITS MANUFACTURING METHOD

• Main Author: MIYAGAWA TOSHIYA
• Format: Patent
• Language: English
• Published: 18.10.1996
• Edition: 6
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: To provide an optical modulator capable of improving a modulation band and performing a higher speed transmission and a manufacturing method capable of producing the optical modulator. CONSTITUTION: A single mode optical waveguide 12 is formed in a substrate 11 and an electrode 3 is provided on the substrate via a buffer layer 17. The electrode 3 consist of a signal electrode 15 and a grounding electrode 16 and these are hunged over the waveguide. The electrode 15 is laminated in multistages and formed so that widths of the electrode become broader with upper stages. Besides, the grounding electrode 16 is formed so that the spaces between the electrode 16 and the electrode 15 hold a prescribed ratio with widths of signal electrode 15. Thus, the cross-sectional area of the signal electrode 15 is expaded, a propagation loss is lowered, and the higher speed transmission is made to be performed without raising a modulation voltage. The manufacturing method is made to perform a photographic process and a plating process repeatingly.