SURFACE ACOUSTIC WAVE ELEMENT AND ITS MANUFACTURE

• Main Authors: SHIMOE KAZUNOBU, HIRAISHI AKIRA
• Format: Patent
• Language: English
• Published: 11.10.1996
• Edition: 6
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

PURPOSE: To realize the surface acoustic wave element with an excellent characteristic without increasing the size of the surface acoustic wave element. CONSTITUTION: Three stages of surface acoustic wave filters each comprising a couple of reflector electrodes 3, 3 and two IDT electrodes 2, 2 formed between the reflector electrodes 3, 3 on a substrate 1 are arranged in parallel. Then plural external extract electrodes 4 are formed to the outside of the forming area of the plural reflector electrodes 3 and an SiO2 thin film 5 is formed between opposed end faces of the substrate 1 to the middle part of the substrate 1 except the area where the plural external extract electrodes 4 are formed so that the plural IDT electrodes 2 and the plural reflector electrodes 3 are covered between the opposed end faces of the substrate 1.