SPECIMEN CONVEYING METHOD IN VACUUM TREATMENT EQUIPMENT

PURPOSE: To provide a specimen conveying method in a vacuum treatment equipment wherein foreing matter is prevented from attaching to the specimen surface to be treated, by performing carriage and treatment while turning the specimen surface to be treated downward. CONSTITUTION: When a specimen surf...

Full description

Saved in:
Bibliographic Details
Main Authors YAMAMOTO HIDEYUKI, SAKO NARIYASU, KARASHIMA YOSUKE
Format Patent
LanguageEnglish
Published 23.07.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: To provide a specimen conveying method in a vacuum treatment equipment wherein foreing matter is prevented from attaching to the specimen surface to be treated, by performing carriage and treatment while turning the specimen surface to be treated downward. CONSTITUTION: When a specimen surface to be treated is turned downward, dipole electrodes having anodes and cathodes are used for revolution arms 3, 4 and stages 5, 6, 7, and electrostatically attracted to the specimen surface to be treated to perform carriage and treatment. By detecting the voltage drop of electrodes as the electrostatic attraction part for retaining specimens 1, 2, the positions of the specimens 1, 2 are detected. Protective stage is installed below each waiting position, and protects a specimen when it drops. When it is detected by a transmission sensor that there is a specimen on the protective stage, the specimen is delivered on the protective stage. Thereby carriage and treatment are performed in the state that the specimen surface to be treated is turned downward.
Bibliography:Application Number: JP19950003073