VACUUM PRESSURE MEASURING APPARATUS
PURPOSE: To provide a vacuum pressure measuring apparatus in which the intensity of a magnetic field can be adjusted easily and of which a connection part to fix a plurality of coil parts is hardly broken by thermal expansion and contaction. CONSTITUTION: A vacuum pressure measuring apparatus is com...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
12.07.1996
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: To provide a vacuum pressure measuring apparatus in which the intensity of a magnetic field can be adjusted easily and of which a connection part to fix a plurality of coil parts is hardly broken by thermal expansion and contaction. CONSTITUTION: A vacuum pressure measuring apparatus is composed of at least a d.c. voltage circuit 2 to make electric current run in and apply d.c. voltage to a pair of electrodes 6A, 6B installed in a vacuum container 5 and an exitation d.c. circuit 3 to make d.c. current run in a solenoid coil 8 installed in the outer circumference of the vacuum container to generate a magnetic field H in order to amplify the ion current (i). A first conductor piece 10A in the inner-most layer and a second conductor piece 10B in the outer most layer of a coil part 20 composed of a plurality of layers connected in series are so set as to face to the inside and the outside, respectively, and a connection part 10 which fixes respective coil parts 20 between the conductor pieces by a fixing means is so installed in the middle layer of the inner- and outer most layers as to make both conductor pieces 10A, 10B overlapped each other and thus a solenoid coil is composed. |
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Bibliography: | Application Number: JP19940319753 |