SEMICONDUCTOR MANUFACTURE DEVICE AND ITS DRIVING METHOD

PURPOSE: To readily drive each unit by displaying a position of a unit on a display by graphic display and a coordinate value. CONSTITUTION: A current position of a designated unit is read and it is displayed on a scale coordinate system on the screen of a display 102. A unit is designated by a top...

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Bibliographic Details
Main Author HAMAZAKI FUMIYOSHI
Format Patent
LanguageEnglish
Published 11.06.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: To readily drive each unit by displaying a position of a unit on a display by graphic display and a coordinate value. CONSTITUTION: A current position of a designated unit is read and it is displayed on a scale coordinate system on the screen of a display 102. A unit is designated by a top window 101. For example, if a blade 102 is selected, a window 103 is displayed by pop up and a position of a blade is displayed by graphic display and a numerical value. Stored position information regarding a designated unit is displayed on a scale coordinate system. The position memory number is displayed left next to the displayed position. A coordinate numerical value is further displayed right next to a displayed position. A corresponding unit is driven synchronizing with movement of a selection position based on a coordinate.
Bibliography:Application Number: JP19940317753