VACUUM TREATMENT APPARATUS

• Main Authors: WAKAMATSU NORIHISA, KODAMA NORIO
• Format: Patent
• Language: English
• Published: 14.05.1996
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THEIR RELEVANT APPARATUS; TRANSPORTING

PURPOSE: To provide a vacuum treatment apparatus which takes out a material to be treated from a cassette case for treatment, can place automatically the treated material from a vacuum treatment chamber in the cassette case, has good thermal conductivity, is suitable for mass production, has good durability, and in which electric loss is reduced and the vacuum treatment chamber can be made compact. CONSTITUTION: In a vacuum treatment apparatus in which a vacuum treatment chamber 2 for conducting vacuum treatment such as etching of a material 16 to be treated is installed adjacent to a vacuum chamber equipped with a cassette case 7a containing the material 16 and a material transportation means, more than one hoist 14 which is loaded with the material and moves vertically between the position and a position for installing the material which is located downward is installed in the vacuum treatment chamber, and a transportation robot 9 which stretches and contracts a transportation means freely stretchably/ contractably/rotatably in more than one direction is installed to constitute the apparatus. After the material being taken out from a cassette case 77 for treatment, the material can be placed automatically in the cassette case 77 so that numbers of the materials can be treated at low temperature.