METHOD AND EQUIPMENT FOR INSPECTING PIN HOLE OF INSULATING FILM

• Main Authors: TANI MOTOAKI, MIYAHARA SHOICHI, NATORI KATSUHIDE
• Format: Patent
• Language: English
• Published: 31.03.1995
• Edition: 6
• Subjects: CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MEASURING; PHYSICS; PRINTED CIRCUITS; TESTING

PURPOSE:To improve high detection precision of a pin hole, facilitate detection, and reduce the manufacturing cost of a inspecting equipment, regarding the inspecting method for pin holes in the insulating film which is formed between conductive layers of a multilayered circuit formed on a substrate. CONSTITUTION:A frame-shaped member 8 is put on an insulating film 3 formed on a substrate 1, and test solution 10 composed of an electrolytic solution 11 and pH indicator 12 is accommodated in the frame-shaped member 8. An electrode plate 25 connected with one side of the electrodes of a DC power supply 20 is dipped in the test solution 10, the other electrode 26 of the DC power supply 20 is connected with a conductive layer 2 formed on a layer just under the insulating film 3, and a DC voltage is applied across the conductive layer 2 and the test solution 10. A pin hole 5 is detected by the use of discolored part 15 generated in the test solution 10.